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RIS citation export for THPTEV015: Cylindrical Magnetron Development for Nb3sn Deposition via Magnetron Sputtering

AU  - Sayeed, Md.N.
AU  - Côté, C.
AU  - Elsayed-Ali, H.
AU  - Eremeev, G.V.
AU  - Farzad, M.A.
AU  - Sarkissian, A.
AU  - Valente-Feliciano, A-M.
ED  - Saito, Kenji
ED  - Xu, Ting
ED  - Sakamoto, Naruhiko
ED  - Lesage, Ana
ED  - Schaa, Volker R.W.
TI  - Cylindrical Magnetron Development for Nb3sn Deposition via Magnetron Sputtering
J2  - Proc. of SRF2021, East Lansing, MI, USA, 28 June-02 July 2021
CY  - East Lansing, MI, USA
T2  - International Conference on RF Superconductivity
T3  - 20
LA  - english
AB  - Due to its better superconducting properties (critical temperature Tc~ 18.3 K, superheating field Hsh~ 400 mT), Nb₃Sn is considered as a potential alternative to niobium (Tc~ 9.25 K, Hsh~ 200 mT) for superconducting radiofrequency (SRF) cavities for particle acceleration. Magnetron sputtering is an effective method to produce superconducting Nb₃Sn films. We deposited superconducting Nb₃Sn films on samples with magnetron sputtering using co-sputtering, sequential sputtering, and sputtering from a stoichiometric target. Nb₃Sn films produced by magnetron sputtering in our previous experiments have achieved DC superconducting critical temperature up to 17.93 K and RF superconducting transition at 17.2 K. A magnetron sputtering system with two identical cylindrical cathodes that can be used to sputter Nb₃Sn films on cavities has been designed and is under development now. We report on the design and the current progress on the development of the system.
PB  - JACoW Publishing
CP  - Geneva, Switzerland
SP  - 868
EP  - 870
KW  - cavity
KW  - target
KW  - site
KW  - radio-frequency
DA  - 2022/10
PY  - 2022
SN  - 2673-5504
SN  - 978-3-95450-233-2
DO  - doi:10.18429/JACoW-SRF2021-THPTEV015
UR  - https://jacow.org/srf2021/papers/thptev015.pdf
ER  -