Author: Giaccone, B.
Paper Title Page
WEPCAV001 Study of the Niobium Oxide Structure and Microscopic Effect of Plasma Processing on the Niobium Surface 585
 
  • B. Giaccone, M. Martinello
    Fermilab, Batavia, Illinois, USA
  • B. Giaccone, J. Zasadzinski
    IIT, Chicago, Illinois, USA
 
  A study of the niobium oxide structure is presented here, with particular focus on the niobium suboxides. Multiple steps of argon sputtering and XPS measurements were carried out until the metal surface was exposed. The sample was then exposed to air and the oxide regrowth was studied. In addition, three Nb samples prepared with different surface treatments were studied before and after being subjected to plasma processing. The scope is investigating the microscopic effect that the reactive oxygen contained in the glow discharge may have on the niobium surface. This study suggests that the Nb2O5 thickness may increase, although no negative change in the cavity performance is measured since the pentoxide is a dielectric.  
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-SRF2021-WEPCAV001  
About • Received ※ 22 June 2021 — Revised ※ 13 September 2021 — Accepted ※ 13 January 2022 — Issue date ※ 16 May 2022
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WEOTEV01
Overview of Recent Progress of Plasma Processing  
 
  • B. Giaccone
    Fermilab, Batavia, Illinois, USA
 
  This talk is an overview of recent worldwide progress of plasma processing programs. Successful plasma processing R&D has been achieved at SNS, FNAL, JLab and other institutes. This talk summarizes the results, status and plans for plasma processing programs around the world not only in offline cavity tests but also in installed cryomodules tests.  
slides icon Slides WEOTEV01 [2.394 MB]  
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