Author: Jiang, X.
Paper Title Page
SUPFDV012 The Development of HiPIMS Multilayer SIS Film Coatings on Copper for SRF Applications 86
 
  • S.B. Leith, X. Jiang, A.O. Sezgin, M. Vogel
    University Siegen, Siegen, Germany
  • B. Butz, Y. Li, J. Müller
    MNaF, Siegen, Germany
  • S. Keckert, J. Knobloch, O. Kugeler, D.B. Tikhonov
    HZB, Berlin, Germany
  • J. Knobloch
    University of Siegen, Siegen, Germany
  • R. Ries, E. Seiler
    Slovak Academy of Sciences, Institute of Electrical Engineering, Bratislava, Slovak Republic
 
  Funding: Authors acknowledge both the EASITrain, Marie Sklodowska-Curie Action (MSCA) Innovative Training Network (ITN), Grant Agreement no. 764879 and the ARIES collaboration, Grant Agreement no. 730871
In recent years, the use of alternatives to bulk Nb in the fabrication of SRF cavities, including novel materials and/or fabrication techniques, have been extensively explored by the SRF community. One of these new methodologies is the use of a superconductor-insulator-superconductor (SIS) multilayer structure. Typically, these have been envisaged for use with bulk Nb cavities. However, it is conceivable to combine the benefits of SIS structures with the benefits of coated Cu cavities. It is also clear that the use of energetic deposition techniques such as high power impulse magnetron sputtering (HiPIMS), provide significant benefits over typical DC magnetron sputtering (MS) coatings, in terms of SRF performance. In light of this, two series of multilayer SIS film coatings, with a Nb-AlN-NbN structure, were deposited onto electropolished OFHC Cu samples, with the use of HiPIMS, in order to determine the efficacy of this approach. This contribution details the development of these coatings and the required optimization of the coating parameters of the separate material systems, through the use of multiple material and superconducting characterization techniques.
 
poster icon Poster SUPFDV012 [2.056 MB]  
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-SRF2021-SUPFDV012  
About • Received ※ 20 June 2021 — Accepted ※ 21 December 2021 — Issue date; ※ 27 April 2022  
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SUPFDV013 HiPIMS NbN Thin Film Development for Use in Multilayer SIS Films 91
 
  • S.B. Leith, B. Bai, X. Jiang, M. Vogel
    University Siegen, Siegen, Germany
  • R. Ries, E. Seiler
    Slovak Academy of Sciences, Institute of Electrical Engineering, Bratislava, Slovak Republic
 
  Funding: Authors acknowledge both the EASITrain, Marie Sklodowska-Curie Action (MSCA) Innovative Training Network (ITN), Grant Agreement no. 764879 and the ARIES collaboration, Grant Agreement no. 730871
As part of efforts to improve the performance of SRF cavities, the use of alternative structures, such as superconductor-insulator-superconductor (SIS) film coatings have been extensively investigated. Initial efforts using DC magnetron sputtering (MS) deposited NbN films showed the efficacy of this approach. The use of energetic condensation methods, such as high power impulse magnetron sputtering (HiPIMS), have already improved the performance of Nb thin films for SRF cavities and have already been used for nitride film coatings in the tool industry. In this contribution, the results from the deposition of HiPIMS NbN thin films onto oxygen free high conductivity (OFHC) Cu substrates are presented. The effects of the different deposition parameters on the deposited films were elucidated through various characterisation methods, resulting in an optimum coating procedure. This allowed for further comparison between the HiPIMS NbN films and the previously presented DC MS NbN films. The results indicate the improvements offered by HiPIMS deposition, most notably, the significant increase in the entry field, and its applicability to the deposition of SIS films on Cu.
 
poster icon Poster SUPFDV013 [0.918 MB]  
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-SRF2021-SUPFDV013  
About • Received ※ 20 June 2021 — Revised ※ 08 July 2021 — Accepted ※ 12 August 2021 — Issue date ※ 25 October 2021
Cite • reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)